Ferroelectric thin films deposited by PLD for tunable capacitors

Perrine Dutheil (1) , Frédéric Dumas-Bouchiat (1) , Catalin Constantinescu (1) , Sébastien Quignon (1) , Pascal Marchet (2) , Corinne Champeaux (1) , Rammal Mohamad (3) , Laure Huitema (3) , Aurelian Crunteanu (4) , Damien Passerieux (4) , Dominique Cros (4) , Thierry Monédière (3) , Valérie Madrangeas (4) , Nedelcu Liviu (5) , Trupina Lucian (5) , Gabriel Banciu (5) , Marin Cernea (5)

1 Axe 2 : procédés de traitements de surface
2 SPCTS-AXE3 - Axe 3 : organisation structurale multiéchelle des matériaux
3 XLIM-OSA - OSA
4 XLIM-MINACOM - MINACOM
5 National Institute for Materials Physics - NIMP (ROMANIA)

Domaines: Electromagnétisme; Matériaux; Micro et nanotechnologies/Microélectronique

Perrine Dutheil, Frédéric Dumas-Bouchiat, Catalin Constantinescu, Sébastien Quignon, Pascal Marchet, et al.. Ferroelectric thin films deposited by PLD for tunable capacitors. 20th International Colloquim on Plasma Processes (CIP), June 1-5 2015, Saint –Etienne, France, Jun 2015, Saint-Etienne, France. ⟨hal-01226006⟩