Transparent Conducting Oxides, MRS Bulletin, vol.38, issue.08, pp.15-21, 2000. ,
DOI : 10.1149/1.1390938
Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering, Thin Solid Films, vol.366, issue.1-2, pp.63-68, 2000. ,
DOI : 10.1016/S0040-6090(00)00731-8
ZnO devices and applications: a review of current status and future prospects, Proc. IEEE 98, pp.1255-1268, 2010. ,
A comprehensive review of ZnO materials and devices, J. Appl. Phys, pp.98-041301, 2005. ,
Transparent Conductive Zinc Oxide: Basics and Applications in Thin Film Solar Cells, 2008. ,
DOI : 10.1007/978-3-540-73612-7
Transparent Conducting Oxides for Photovoltaics, MRS Bulletin, vol.1, issue.03, pp.242-247, 2007. ,
DOI : 10.1016/S0167-577X(02)00904-7
Wet-etch texturing of ZnO:Ga back layer on superstrate-type microcrystalline silicon solar cells, Solar Energy Materials and Solar Cells, vol.95, issue.7, pp.1583-1586, 2011. ,
DOI : 10.1016/j.solmat.2011.02.011
Instabilities in reactive sputtering of ZnO:Al and reliable texture-etching solution for light trapping in silicon thin film solar cells, Thin Solid Films, vol.520, issue.6, pp.1913-1917, 2012. ,
DOI : 10.1016/j.tsf.2011.09.031
Recent development on surface-textured ZnO:Al films prepared by sputtering for thin-film solar cell application, Thin Solid Films, vol.516, issue.17, pp.5836-5841, 2008. ,
DOI : 10.1016/j.tsf.2007.10.029
Highly efficient nanocrystalline ZnO thin films prepared by a novel method and their application in dye-sensitized solar cells, Applied Physics A, vol.56, issue.3, pp.655-663, 2012. ,
DOI : 10.1007/s00339-012-7089-x
Synthesis of different ZnO nanostructures by modified PVD process and potential use for dye-sensitized solar cells, Materials Chemistry and Physics, vol.124, issue.1, pp.694-698, 2010. ,
DOI : 10.1016/j.matchemphys.2010.07.035
Gas-Sensitive Photoconductivity of Porphyrin-Functionalized ZnO Nanorods, The Journal of Physical Chemistry C, vol.116, issue.16, pp.9151-9157, 2012. ,
DOI : 10.1021/jp302225u
Zinc Oxide Nanostructures: Synthesis and Properties, Journal of Nanoscience and Nanotechnology, vol.5, issue.10, pp.1561-1573, 2005. ,
DOI : 10.1166/jnn.2005.182
An aqueous solution approach to advanced metal oxide arrays on substrates, Applied Physics A, vol.17, issue.1, pp.1-8, 2007. ,
DOI : 10.1007/s00339-007-4039-0
Structural study and phase transition investigation in a simple synthesis of porous architected-ZnO nanopowder, Materials Characterization, vol.86, pp.206-211, 2013. ,
DOI : 10.1016/j.matchar.2013.10.004
URL : https://hal.archives-ouvertes.fr/hal-01167288
Preparation and characterization of the defect???conductivity relationship of Ga-doped ZnO thin films deposited by nonreactive radio-frequency???magnetron sputtering, Journal of Materials Research, vol.25, issue.12, pp.25-2407, 2010. ,
DOI : 10.1557/jmr.2010.0300
Wet etching of gallium indium zinc oxide (GIZO) semiconductor for thin film transistor application, J. Korean Phys. Soc, vol.53, issue.5, pp.2603-2606, 2008. ,
Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells, Solar Energy Materials and Solar Cells, vol.95, issue.3, pp.964-968, 2011. ,
DOI : 10.1016/j.solmat.2010.11.033
Zinc Oxide Nanostructures and Their Core???Shell Luminescence Properties, The Journal of Physical Chemistry C, vol.111, issue.26, pp.9081-9085, 2007. ,
DOI : 10.1021/jp0663208
Control of the Surface of ZnO Nanostructures by Selective Wet-Chemical Etching, The Journal of Physical Chemistry C, vol.114, issue.22, pp.10114-10118, 2010. ,
DOI : 10.1021/jp101284p
Study on the wet etch behavior of a zinc-oxide semiconductor in acid solutions, J. Korean Phys. Soc, pp.53-402, 2008. ,
The microstructure of sputter???deposited coatings, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.4, issue.6, pp.3059-3065, 1986. ,
DOI : 10.1116/1.573628
A structure zone diagram including plasma-based deposition and ion etching, Thin Solid Films, vol.518, issue.15, pp.4087-4090, 2010. ,
DOI : 10.1016/j.tsf.2009.10.145
Presmanes, Ph. Tailhades, Microstructure and electrical properties of sputter deposited Zn0.87Fe2.13O4 thin layers, J. Appl. Phys, pp.96-6142, 2004. ,
Nanostructured cobalt manganese ferrite thin films for gas sensor application, Thin Solid Films, vol.495, issue.1-2, pp.130-133, 2006. ,
DOI : 10.1016/j.tsf.2005.08.318
URL : https://hal.archives-ouvertes.fr/hal-00474866
Microstructure, porosity and roughness of RF sputtered oxide thin films: Characterization and modelization, Applied Surface Science, vol.254, issue.18, pp.5796-5802, 2008. ,
DOI : 10.1016/j.apsusc.2008.03.149
Determination of the thickness and optical constants of amorphous silicon, Journal of Physics E: Scientific Instruments, vol.16, issue.12, pp.1214-1222, 1983. ,
DOI : 10.1088/0022-3735/16/12/023
Columnar growth structure and evolution of wavy interface morphology in amorphous and polycrystalline multilayered thin films, Thin Solid Films, vol.347, issue.1-2, pp.133-145, 1999. ,
DOI : 10.1016/S0040-6090(98)01760-X
Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate, Applied Surface Science, vol.258, issue.22, pp.258-8819, 2012. ,
DOI : 10.1016/j.apsusc.2012.05.097
Conversion of ZnO Nanowires into Nanotubes with Tailored Dimensions, Chemistry of Materials, vol.20, issue.21, pp.6633-6637, 2008. ,
DOI : 10.1021/cm801131t
chemical etching synthesis of ZnO nanotips array, Applied Physics Letters, vol.93, issue.15, pp.153110-153111, 2008. ,
DOI : 10.1063/1.2951609
Fabrication of porous ZnO via electrochemical etching using 10 wt% potassium hydroxide solution, Mater. Sci. Semicond. Process, pp.16-70, 2013. ,
Optical and structural properties of porous zinc oxide fabricated via electrochemical etching method, Materials Science and Engineering: B, vol.178, issue.15, pp.956-959, 2013. ,
DOI : 10.1016/j.mseb.2013.05.002
Optical Properties and Electronic Structure of Amorphous Germanium, physica status solidi (b), vol.24, issue.2, 1966. ,
DOI : 10.1002/pssb.19660150224
http://www.wtheiss.com/ CODE -A thin film analysis and design software ,
Modeling the optical dielectric function of semiconductors: Extension of the critical-point parabolic-band approximation, Physical Review B, vol.45, issue.20, pp.11749-11767, 1992. ,
DOI : 10.1103/PhysRevB.45.11749
Berechnung verschiedner physikalischer Konstanten von heterogenen Systemen, Annalen der Physik, vol.24, pp.636-679, 1935. ,