SystemC-AMS Simulation of Biaxial Accelerometer based on MEMS Reduced-Order Modeling

Benoit Vernay (1) , Arnaud Krust , Gerold Schroepfer , François Pêcheux (1) , Marie-Minerve Louërat (1)

1 CIAN - Circuits Intégrés Numériques et Analogiques

This paper proposes a framework for system-level modeling and simulation of a Micro Electro-Mechanical System (MEMS). We show how a reduced-order model of MEMS can be integrated into SystemC-AMS. We propose the use of an external linear algebra library and alternative time integration method. Both are used to customize a Timed Data Flow (TDF) module to address MEMS modeling. Experiments are conducted on a biaxial accelerometer to verify its response to a ramp impulse. Our implementation runs about twice as fast as the state space resolution currently implemented in SystemC-AMS 2.0. Results highlight potential improvements of SystemC-AMS standard to correctly simulate the analog behavior of MEMS devices.

Domaines: Informatique [cs]

Benoit Vernay, Arnaud Krust, Gerold Schroepfer, François Pêcheux, Marie-Minerve Louërat. SystemC-AMS Simulation of Biaxial Accelerometer based on MEMS Reduced-Order Modeling. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, Apr 2015, Montpellier, France. pp.1-6, ⟨10.1109/DTIP.2015.7160987⟩. ⟨hal-01216673⟩