Pb(Zr,Ti)03 ceramic thick films for optical device applications - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Proceedings of SPIE, the International Society for Optical Engineering Année : 2003

Pb(Zr,Ti)03 ceramic thick films for optical device applications

Résumé

Ferroelectric Pb,ZrTi1O3 (PZT) has been prepared by chemical solution deposition (CSD) and spin-coating technique, using acetate and alkoxide precursors. Rapid thermal annealing has been employed in order to obtain crystallization in the perovskite phase. Aiming to study the optical properties of the films, PZT was deposited on different glass substrates. Structural characterization ofthe films was done by X-ray diffraction, morphology was investigated by SEM micrography. Using standard photography analysis, the films were qualified in terms of crack density, their appearance strongly depending on the type of substrate. Using a visible to the near infrared spectrophotometer, the transmittance normal to the surface ofthe films was studied. Coupling oflaser light into the films by the M-lines technique allowed the determination of the refractive index and the thickness of the ferroelectric layer. A waveguiding interferometer structure of Mach-Zehnder type was realized by photolithography and wet chemical etching.
Fichier principal
Vignette du fichier
Cardin_PZT_2003.pdf (610.86 Ko) Télécharger le fichier
Origine : Fichiers éditeurs autorisés sur une archive ouverte
Loading...

Dates et versions

hal-01214447 , version 1 (12-10-2015)

Identifiants

Citer

J. Cardin, Dominique Leduc, C Boisrobert, H.W. Gundel. Pb(Zr,Ti)03 ceramic thick films for optical device applications. Proceedings of SPIE, the International Society for Optical Engineering, 2003, 5122, pp.371-376. ⟨10.1117/12.515798⟩. ⟨hal-01214447⟩
617 Consultations
126 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More