Nanometer Scale Patterning of Langmuir−Blodgett Films of Gold Nanoparticles by Electron Beam Lithography

Martinus H. V. Werts (1) , Mathieu Lambert (1) , Jean-Philippe Bourgoin (1) , Mathias Brust (2)

1 SCM - Service de Chimie Moléculaire
2 University of Liverpool

Electron beam lithography on Langmuir−Blodgett films of alkanethiol-capped gold nanoparticles is shown to be a viable strategy to define nanometer scale structures of such particles. Sub-50 nm wide “nanowires”, the thickness of which is controlled at the single particle level, are created with e-beam doses in the mC/cm 2 range. It is shown that the patterns are formed by radiation-induced cross-linking of the alkyl chains and that they can be contacted and studied electrically.

Domaines: Micro et nanotechnologies/Microélectronique

Martinus H. V. Werts, Mathieu Lambert, Jean-Philippe Bourgoin, Mathias Brust. Nanometer Scale Patterning of Langmuir−Blodgett Films of Gold Nanoparticles by Electron Beam Lithography. Nano Letters, 2002, 2, pp.43-47. ⟨10.1021/nl015629u⟩. ⟨hal-01206374⟩