Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates

Yann Cohin 1, 2 Frank Glas 1 Andrea Cattoni 1 Sophie Bouchoule 1 Olivia Mauguin 1 Ludovic Largeau 1 Gilles Patriache 1 E. Sondergard 2 Jean-Christophe Harmand 1
1 LPN - Laboratoire de photonique et de nanostructures
2 SVI - Surface du Verre et Interfaces
Abstract : Fiber-textured polycrystalline silicon thin films have demonstrated their interest as seed layers for the epitaxial growth of high-quality materials on substrates such as glass or plastics. In the present work, we report a comprehensive study of the aluminum-induced crystallization (AIC) of isolated Si domains. Our study not only demonstrates the fabrication by AIC of shape- and size-controlled Si monocrystals at the nanoscale but also allows for the prediction of minimal annealing conditions for complete crystallization of such structures. These ultrathin [111]-oriented monocrystals are promising candidates as selected-area epitaxy substrates with both an easy control on the morphology of these structures and a low-temperature fabrication process.
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https://hal.archives-ouvertes.fr/hal-01184912
Contributeur : Valérie Tinchon <>
Soumis le : mardi 18 août 2015 - 13:46:58
Dernière modification le : mercredi 15 mai 2019 - 04:09:03

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CNRS | SVI | SORBONNE-UNIVERSITE | SU-SCIENCES

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Yann Cohin, Frank Glas, Andrea Cattoni, Sophie Bouchoule, Olivia Mauguin, et al.. Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates. Crystal Growth and Design, American Chemical Society, 2015, 15 (5), pp.2102-2109. ⟨10.1021/cg5016548⟩. ⟨hal-01184912⟩

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