Performances and instabilities of silicon based microdischarges

Remi Dussart (1) , Valentin Felix (1) , Lawrence J. Overzet (2) , Olivier Aubry (1) , Philippe Lefaucheux (1) , Judith Golda (3) , V. Schulz-von Der Gathen (3)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 PAL - Plasma Application Laboratory
3 Institute for Applied Plasma Physics

Domaines: Physique des plasmas [physics.plasm-ph]

Remi Dussart, Valentin Felix, Lawrence J. Overzet, Olivier Aubry, Philippe Lefaucheux, et al.. Performances and instabilities of silicon based microdischarges. International workshop on microplasmas, May 2015, Newark, United States. ⟨hal-01166019⟩