Fabrication of ZnSe-based microcavities for lasing in the strong coupling regime and polariton confinement

Thorsten Klein (1) , Sebastian Klembt (2) , Sebald Kathrin (1) , Figge Stephan (1) , Gust Arne (1) , Carsten Kruse (1) , Detlef Hommel (1) , Gutowski Jürgen (1) , Emilien Durupt (2) , Daniel Le Si Dang (2) , Maxime Richard (2)

1 Universität Bremen
2 NEEL - NPSC - Nanophysique et Semiconducteurs

We report on the realization of monolithic, i.e. fully epitaxial ZnSe-based microcavities with a 1λ-cavity and a 3λ-cavity for the investigation of strong coupling phenomena. A crucial building block is the fabrication of a lattice matched distributed Bragg reflector for the blue spectral region, consisting of quaternary ZnMgSSe layers as the high-index material and a MgS/ZnCdSe superlattice as the low-index material. Strong coupling at low temperatures was achieved with a vacuum Rabi splitting of 19 meV for the 1λ-cavity (at 70K) and of 40 meV for the 3λ-cavity (at 7 K). Microstructures such as micropillars, waveguides, ringresonators, and molecule chains were fabricated using focused ion-beam etching. Discrete optical modes in micropillars were observed for both cavity lengths confirming three-dimensional optical confinement. Q-factors up to 6500 indicate a high optical quality.

Domaines: Gaz Quantiques [cond-mat.quant-gas]; Physique Quantique [quant-ph]

Thorsten Klein, Sebastian Klembt, Sebald Kathrin, Figge Stephan, Gust Arne, et al.. Fabrication of ZnSe-based microcavities for lasing in the strong coupling regime and polariton confinement. physica status solidi (c), 2014, 11 (7-8), pp.1267. ⟨10.1002/pssc.201300705⟩. ⟨hal-01152673⟩