PZT Nanofilm-Based Wafer Scale Nanoresonators

Abstract : In this work, we present an unprecedented level of integration of piezoelectric actuation means on arrays of functional nanoresonators at the wafer scale. We use 150-nm thin lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale. This work paves promising ways for NEMS to be used in configurations where transduction capabilities are integrated at the nanodevice level providing effective fabrication process flow at the wafer-scale.
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Denis Dezest, Fabrice Mathieu, Laurent Mazenq, Liviu Nicu, Caroline Soyer, et al.. PZT Nanofilm-Based Wafer Scale Nanoresonators. IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p. ⟨hal-01144194⟩

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