Damped Aero-Acoustic Microphone with Improved High-Frequency Characteristics

Z. Zhou 1 L. Rufer 2 M. Wong 1
1 HKUST - Hong Kong University of Science and Technology
2 TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
Abstract : With the mechanical resonance damped using a perforated back-plate underneath the sensing diaphragm, a piezoresistive aero-acoustic microphone with improved high-frequency characteristics is demonstrated. The sensing diaphragm and the damper back-plate were monolithically integrated in one process flow. The microphone was calibrated using a high-voltage electrical spark-discharge acoustic N-wave source. A sensitivity of ~0.33 μV/V/Pa, a bandwidth of ~520 kHz at 3-dB attenuation, and a significant damping of the mechanical resonance were realized.
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https://hal.archives-ouvertes.fr/hal-01142416
Contributeur : Lucie Torella <>
Soumis le : mercredi 15 avril 2015 - 10:54:48
Dernière modification le : mercredi 16 mai 2018 - 18:30:05

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Z. Zhou, L. Rufer, M. Wong. Damped Aero-Acoustic Microphone with Improved High-Frequency Characteristics. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2014, 23 (5), pp.1094 - 1100. ⟨10.1109/JMEMS.2014.2304730⟩. ⟨hal-01142416⟩

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