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Article Dans Une Revue Journal of Applied Physics Année : 2005

Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar/ SF 6 mixtures

Résumé

It has previously been shown ͓Tuszewski et al., Plasma Sources Sci. Technol. 12, 396 ͑2003͔͒ that inductive discharges in electronegative gases are subject to two types of instability: the source instability related to the E to H transition and a transport instability, occurring downstream when an expanding chamber is present. These two types of instability are observed in our " helicon " reactor operated without a static magnetic field in low-pressure Ar/ SF 6 mixtures. Temporally and spatially resolved measurements show that, in our experiment, the downstream instability is a periodic formation and propagation of a double layer. The double layer is born at the end of the source tube and propagates slowly to the end of the expansion region with a velocity of 150 m s −1 .
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Dates et versions

hal-01140498 , version 1 (09-04-2015)

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Nicolas Plihon, C.S. Corr, Pascal Chabert, Jean-Luc Raimbault. Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar/ SF 6 mixtures. Journal of Applied Physics, 2005, 98, pp.023306. ⟨10.1063/1.1947387⟩. ⟨hal-01140498⟩
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