Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates

Yann Cohin (1, 2) , Frank Glas (2) , Andrea Cattoni (2) , Sophie Bouchoule (2) , Olivia Mauguin (2) , Ludovic Largeau (2) , Gilles Patriarche (2) , Elin Sondergard (1) , Jean Christophe Harmand (2)

1 SVI - Surface du Verre et Interfaces
2 LPN - Laboratoire de photonique et de nanostructures

Fiber-textured polycrystalline silicon thin films have demonstrated their interest as seed layers for the epitaxial growth of high-quality materials on substrates such as glass or plastics. In the present work, we report a comprehensive study of the aluminum-induced crystallization (AIC) of isolated Si domains. Our study not only demonstrates the fabrication by AIC of shape- and size-controlled Si monocrystals at the nanoscale but also allows for the prediction of minimal annealing conditions for complete crystallization of such structures. These ultrathin [111]-oriented monocrystals are promising candidates as selected-area epitaxy substrates with both an easy control on the morphology of these structures and a low-temperature fabrication process.

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Yann Cohin, Frank Glas, Andrea Cattoni, Sophie Bouchoule, Olivia Mauguin, et al.. Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates. Crystal Growth & Design, 2015, ⟨10.1021/cg5016548⟩. ⟨hal-01139953⟩