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Parameter-tolerant design of high contrast gratings

Abstract : This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
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https://hal.archives-ouvertes.fr/hal-01132683
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Submitted on : Thursday, April 16, 2020 - 2:47:43 PM
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Christyves Chevallier, Nicolas Fressengeas, Joel Jacquet, Guilhem Almuneau, Youness Laaroussi, et al.. Parameter-tolerant design of high contrast gratings. Photonics West, SPIE, Feb 2015, San Francisco, United States. pp.93720N-93720N-8, ⟨10.1117/12.2081595⟩. ⟨hal-01132683⟩

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