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Parameter-tolerant design of high contrast gratings
Abstract : This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
Cited literature [31 references]
https://hal.archives-ouvertes.fr/hal-01132683
Contributor : Nicolas Fressengeas Connect in order to contact the contributor
Submitted on : Thursday, April 16, 2020 - 2:47:43 PM
Last modification on : Tuesday, May 17, 2022 - 2:10:09 PM
Contributor : Nicolas Fressengeas Connect in order to contact the contributor
Submitted on : Thursday, April 16, 2020 - 2:47:43 PM
Last modification on : Tuesday, May 17, 2022 - 2:10:09 PM
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