Parameter-tolerant design of high contrast gratings

Abstract : This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
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Contributor : Nicolas Fressengeas <>
Submitted on : Tuesday, March 17, 2015 - 4:50:18 PM
Last modification on : Friday, January 10, 2020 - 9:08:10 PM



Christyves Chevallier, Nicolas Fressengeas, Joel Jacquet, Guilhem Almuneau, Youness Laaroussi, et al.. Parameter-tolerant design of high contrast gratings. Photonics West, SPIE, Feb 2015, San Francisco, United States. pp.93720N-93720N-8, ⟨10.1117/12.2081595⟩. ⟨hal-01132683⟩



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