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Communication Dans Un Congrès Année : 2014

Characterization and properties of binary and ternary alloys deposited by combinatorial magnetron sputtering

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Plasmas Matériaux
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hal-01120853 , version 1 (26-02-2015)

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  • HAL Id : hal-01120853 , version 1

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Perrine Dutheil, A.-L. Thomann, Pascal Brault, Lu Xie, Marylène Vayer, et al.. Characterization and properties of binary and ternary alloys deposited by combinatorial magnetron sputtering. Plasma Surface Engineering - PSE 2014, Sep 2014, Garmisch-Partenkirchen, Germany. ⟨hal-01120853⟩
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