Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach

J. Zelgowski (1) , F. Mermet (2) , F. Antoni , Cyril Mauclair (3, 4) , Eric Fogarassy , Eric Mottay (5)

1 IREPA-Laser
2 ICube - Laboratoire des sciences de l'ingénieur, de l'informatique et de l'imagerie
3 LHC - Laboratoire Hubert Curien
4 GIE Manutech-USD
5 Amplitude Systèmes

An increase of industrial needs for micro-ablation and surface structuration using sub-picosecond laser working at high repetition rate is required. In this context, new industrial lasers were recently commercialized for such a type of purpose. The potential of a new industrial femtosecond laser source (Tangerine model from Amplitude Système) is investigated in this work for different etching purposes. Our experimental results will be also compared to those obtained when using Ti:Sa laser source, with the help of numerical simulations.

Domaines: Optique / photonique

J. Zelgowski, F. Mermet, F. Antoni, Cyril Mauclair, Eric Fogarassy, et al.. Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach. Proceedings of SPIE, the International Society for Optical Engineering, 2014, 8967, pp.5. ⟨10.1117/12.2037736⟩. ⟨hal-01114172⟩