Advances in VCSELs for Communication and Sensing, IEEE Journal of Selected Topics in Quantum Electronics, vol.17, issue.6, p.1552, 2011. ,
DOI : 10.1109/JSTQE.2011.2119469
VCSELs: A Research Review, ) Springer Series in Optical Sciences, p.3 ,
DOI : 10.1007/978-3-642-24986-0_1
Towards VCSEL-based integrated optical traps for biomedical applications, Electronics Letters, vol.42, issue.2, p.93, 2006. ,
DOI : 10.1049/el:20063821
High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array, Optics Express, vol.18, issue.23, p.23900, 2010. ,
DOI : 10.1364/OE.18.023900
Microlens fabrication by selective oxidation of composition-graded digital alloy AlGaAs, IEEE Photonics Technology Letters, vol.18, issue.1, p.121, 2006. ,
DOI : 10.1109/LPT.2005.860051
Replication technology for optical microsystems, Optics and Lasers in Engineering, vol.43, issue.3-5, p.373, 2005. ,
DOI : 10.1016/j.optlaseng.2004.02.007
Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers, IEEE Photonics Technology Letters, vol.22, issue.21, p.1592, 2010. ,
DOI : 10.1109/LPT.2010.2071861
URL : https://hal.archives-ouvertes.fr/hal-00589356
Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes, Journal of Micromechanics and Microengineering, vol.22, issue.6, p.65006, 2012. ,
DOI : 10.1088/0960-1317/22/6/065006
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS, Sensors and Actuators A: Physical, vol.64, issue.1, p.33, 1998. ,
DOI : 10.1016/S0924-4247(98)80055-1
Ultrathin Optoelectronic Device Packaging in Flexible Carriers, IEEE Journal of Selected Topics in Quantum Electronics, vol.17, issue.3, p.617, 2011. ,
DOI : 10.1109/JSTQE.2010.2096407
Corrosion-Based Failure of Oxide-Aperture VCSELs, IEEE Journal of Quantum Electronics, vol.49, issue.12, p.1045, 2013. ,
DOI : 10.1109/JQE.2013.2285572
Realization and characterization of SU-8 micro cylindrical lenses for in-plane micro optical systems, Microsystem Technologies, vol.11, issue.6, p.429, 2005. ,
DOI : 10.1007/s00542-004-0463-7
Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings, Journal of Micromechanics and Microengineering, vol.13, issue.1, p.80, 2003. ,
DOI : 10.1088/0960-1317/13/1/312
Application of epoxy-based photosensitive polymers for optical MEMS and subsequent reliability evaluation, Materials Chemistry and Physics, vol.98, issue.2-3, p.309, 2006. ,
DOI : 10.1016/j.matchemphys.2005.09.026
Reliability aspects of a radiation detector fabricated by post-processing a standard CMOS chip, Microelectronics Reliability, vol.48, issue.8-9, p.1139, 2008. ,
DOI : 10.1016/j.microrel.2008.06.038
Quality engineering (Taguchi methods) for the development of electronic circuit technology, IEEE Transactions on Reliability, vol.44, issue.2, p.225, 1995. ,
DOI : 10.1109/24.387375
Relationship Between Interfacial Water Layer Adhesion Loss of Silicon/Glass Fiber???Epoxy Systems: A Quantitative Study, The Journal of Adhesion, vol.312, issue.6, p.587, 2007. ,
DOI : 10.1016/0015-0568(69)90029-3