On the relevance of large scale pulsed-laser deposition: Evidence of structural heterogeneities in ZnO thin films - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Applied Physics Année : 2014

On the relevance of large scale pulsed-laser deposition: Evidence of structural heterogeneities in ZnO thin films

Résumé

Pulsed-laser deposition is known as a well-suited method for growing thin films of oxide compounds presenting a wide range of functional properties. A limitation of this method for industrial process is the very anisotropic expansion dynamics of the plasma plume, which induces difficulties to grow on large scale films with homogeneous thickness and composition. The specific aspect of the crystalline or orientation uniformity has not been investigated, despite its important role on oxide films properties. In this work, the crystalline parameters and the texture of zinc oxide films are studied as a function of position with respect to the central axis of the plasma plume. We demonstrate the existence of large non-uniformities in the films. The stoichiometry, the lattice parameter, and the distribution of crystallites orientations drastically depend on the position with respect to the plume axis, i.e., on the oblique incidence of the ablated species. The origin of these non-uniformities, in particular, the unexpected tilted orientation of the ZnO c-axis may be attributed to the combined effects of the oblique incidence and of the ratio between oxygen and zinc fluxes reaching the surface of the growing film.
Fichier principal
Vignette du fichier
PIMM - JAP - PERRIERE - 2014.pdf (1.86 Mo) Télécharger le fichier
Format : typeAnnex_author
Loading...

Dates et versions

hal-01081606 , version 1 (10-11-2014)

Identifiants

Citer

J Perrière, C Hebert, Nathalie Jedrecy, W Seiler, O Zanellato, et al.. On the relevance of large scale pulsed-laser deposition: Evidence of structural heterogeneities in ZnO thin films. Journal of Applied Physics, 2014, 116, pp.123502. ⟨10.1063/1.4896379⟩. ⟨hal-01081606⟩
301 Consultations
206 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More