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, ?8) spectra of Si-rich-HfO 2 (1,5) and Er-doped-Si-rich-HfO 2 (2?4, 6?8) films. PL spectra were measured under excitation with ? exc ¼ 300 nm (1,2), 280 nm (3) and 260 nm (4). PLE spectra were detected at ? det ¼ 450 nm (5,6), 650 nm (7) and 615 nm (8) wavelengths. All films were annealed at T A ¼900 1C and t A ¼ 60 min. The spectra are shifted in vertical direction for clarity. (For interpretation of the references to color in this figure legend, the reader is referred to the web version of this article, Fig. 8. PL (1?4) and PL excitation