Boron-doped superlattices and Bragg mirrors in diamond

Alexandre Fiori (1) , Jessica Bousquet (1) , David Eon (1) , Franck Omnès (1) , E Bellet-Amalric (2) , Etienne Bustarret (1)

1 NEEL - SC2G - Semi-conducteurs à large bande interdite
2 NPSC - Nanophysique et Semiconducteurs

A periodic modulation of the boron doping level of single crystal diamond multilayers over more than three orders of magnitude during epitaxial growth by microwave plasma-enhanced chemical vapor deposition is shown to yield Bragg mirrors in the visible. The thicknesses and doping level of the individual layers were controlled by in situ spectroscopic ellipsometry, enabling to tune the reflec-tance peak to the wavelength range of diamond color centers, such as NV 0 or NV À . The crystalline quality, periodicity, and sharpness of the doping transitions in these doping superlattices over tens of periods were confirmed by high resolution X-ray diffraction.

Mots clés: Bragg mirrors; diamond; doping superlattice; spectroscopic ellipsometry

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Alexandre Fiori, Jessica Bousquet, David Eon, Franck Omnès, E Bellet-Amalric, et al.. Boron-doped superlattices and Bragg mirrors in diamond. Applied Physics Letters, 2014, 105 (8), pp.081109. ⟨10.1063/1.4894376⟩. ⟨hal-01076903⟩