Alternative mass sensing techniques based on nonlinear phenomena in M/NEMS resonators

van Nghi Nguyen (1) , Sébastien Baguet (1) , Claude-Henri Lamarque , Régis Dufour (1)

1 DCS - Dynamique et Contrôle des Structures

This paper investigates alternative mass sensing techniques that take advantage of multi-stability and bifurcations observed in the nonlinear regime. A finite-degree-of-freedom reduced-order model of an electrostatically-actuated microbeam with small added mass is considered. Strategies are proposed for robust real-time detection, quantification and localization of the added mass.

Domaines: Vibrations [physics.class-ph]; Micro et nanotechnologies/Microélectronique

van Nghi Nguyen, Sébastien Baguet, Claude-Henri Lamarque, Régis Dufour. Alternative mass sensing techniques based on nonlinear phenomena in M/NEMS resonators. ENOC2014 - 8th European Nonlinear Dynamics Conference, Jul 2014, Vienna, Austria. ⟨hal-01075992⟩