Spatial correction in dynamic photon emission by affine transformation matrix estimation

Abstract : Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.
Type de document :
Communication dans un congrès
IEEE 21st Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Jun 2014, Singapore. pp.118-122, 2014
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https://hal.archives-ouvertes.fr/hal-01073233
Contributeur : Samuel Chef <>
Soumis le : jeudi 9 octobre 2014 - 12:09:41
Dernière modification le : mercredi 12 septembre 2018 - 01:27:09

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  • HAL Id : hal-01073233, version 1

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Samuel Chef, Sabir Jacquir, Philippe Perdu, Kevin Sanchez, Stéphane Binczak. Spatial correction in dynamic photon emission by affine transformation matrix estimation. IEEE 21st Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Jun 2014, Singapore. pp.118-122, 2014. 〈hal-01073233〉

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