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Investigation of the thermal properties of thin solid materials at different temperature levels using a set of microresistors

Ali Assy 1 Séverine Gomès 1 Patrice Chantrenne 1 Nicolas Pavy 2 Jayalakshmi Parasuraman 2 Xavier Kleber 3 Philippe Basset 2
1 CETHIL - Centre de Thermique de Lyon
2 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
3 MATEIS - Matériaux, ingénierie et science [Villeurbanne]
Keywords : Thermal diffusivity Thermal conductivity Contact metrology Microresistors "Thermal diffusivity" "Thermal conductivity" "Contact metrology" "Microresistors"
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Journal articles
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https://hal.archives-ouvertes.fr/hal-01019637
Contributor : Laboratoire Cethil <>
Submitted on : Monday, July 7, 2014 - 11:53:05 AM
Last modification on : Friday, June 11, 2021 - 1:00:03 PM

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CNRS | UPEC-UPEM | CNAM | ESYCOM | CETHIL | UNIV-LYON1 | MATEIS | ESIEE-PARIS | UNIV-HESAM | INSA-GROUPE | UDL

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Ali Assy, Séverine Gomès, Patrice Chantrenne, Nicolas Pavy, Jayalakshmi Parasuraman, et al.. Investigation of the thermal properties of thin solid materials at different temperature levels using a set of microresistors. Microelectronics Journal, Elsevier, 2014, 45 (5), p. 508-514. ⟨10.1016/j.mejo.2013.08.006⟩. ⟨hal-01019637⟩

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