Development of analytical models of T- and U-shaped cantilever-based MEMS devices for sensing and energy harvesting applications

Stephen Heinrich (1) , Mohand-Tayeb Boudjiet (2) , Damien Thuau (2) , Cédric Ayela (2) , Isabelle Dufour (2)

1 Department of Civil, Construction and Environmental Engineering [Milwaukee]
2 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Stephen Heinrich, Mohand-Tayeb Boudjiet, Damien Thuau, Cédric Ayela, Isabelle Dufour. Development of analytical models of T- and U-shaped cantilever-based MEMS devices for sensing and energy harvesting applications. IEEE Sensors 2014, 2014, Valence, Spain. 4 p. ⟨hal-01011598⟩