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Article Dans Une Revue Journal of the European Ceramic Society Année : 2005

Optical characterization of PZT thin films for waveguide applications

Résumé

In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic ferroelectric thin films were elaborated by a modified sol-gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on PZT layers. Two different processes of PZT elaboration were made and studied with this apparatus. The reproducibility of one fabrication process was tested and results are presented in this paper.
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hal-00995721 , version 1 (23-05-2014)

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Paternité - Pas d'utilisation commerciale - Pas de modification

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Julien Cardin, Dominique Leduc, Thomas Schneider, Cyril Lupi, Dominique Averty, et al.. Optical characterization of PZT thin films for waveguide applications. Journal of the European Ceramic Society, 2005, 25 (12), pp.2913-2916. ⟨10.1016/j.jeurceramsoc.2005.03.163⟩. ⟨hal-00995721⟩
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