Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors

Abstract : The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology
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Jillian Kiser, Ron Lacomb, Konrad Bussmann, Christopher J. Hawley, Jonathan E. Spanier, et al.. Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors. Applied Physics Letters, American Institute of Physics, 2014, pp.P072408. ⟨hal-00995298⟩

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