Compressively-Stressed Test Structures for Opaque Micro-Structures Releasing Visualization

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https://hal.archives-ouvertes.fr/hal-00987105
Contributor : Olivier Francais <>
Submitted on : Monday, May 5, 2014 - 2:47:30 PM
Last modification on : Tuesday, January 15, 2019 - 2:54:15 PM

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  • HAL Id : hal-00987105, version 1

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Agnes Tixier, E. Lebrasseur, T. Takahashi, Olivier Français, Bruno Le Pioufle, et al.. Compressively-Stressed Test Structures for Opaque Micro-Structures Releasing Visualization. International Conference on Microelectronic Test Structures, Mar 2014, Udine, Italy. pp.170-173. ⟨hal-00987105⟩

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