Micro-fluidic channel integration on thick-SOI LSI device for cells analyses

Mots-clés : SOI Microfluidique
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https://hal.archives-ouvertes.fr/hal-00987092
Contributor : Olivier Francais <>
Submitted on : Monday, May 5, 2014 - 2:31:55 PM
Last modification on : Tuesday, January 15, 2019 - 2:54:15 PM

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  • HAL Id : hal-00987092, version 1

Citation

Agnes Tixier, Isao Mori, T. Takahashi, Olivier Français, Bruno Le Pioufle, et al.. Micro-fluidic channel integration on thick-SOI LSI device for cells analyses. Sensor Symposium 2013, Nov 2013, Sendaï, Japan. pp.320-325. ⟨hal-00987092⟩

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