Residual and intentional n-type doping of ZnO thin films grown by metal-organic vapor phase epitaxy on sapphire and ZnO substrates

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https://hal.archives-ouvertes.fr/hal-00984425
Contributor : Julien Pernot <>
Submitted on : Monday, April 28, 2014 - 1:54:33 PM
Last modification on : Monday, May 13, 2019 - 2:00:41 PM

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Stéphane Brochen, M. Lafossas, Ivan-Christophe Robin, Pierre Ferret, Frédérique Gemain, et al.. Residual and intentional n-type doping of ZnO thin films grown by metal-organic vapor phase epitaxy on sapphire and ZnO substrates. Journal of Applied Physics, American Institute of Physics, 2014, 115 (11), pp.113508. ⟨10.1063/1.4868591⟩. ⟨hal-00984425⟩

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