Heat Balanced Bolometer with Sigma-Delta Interface

Matthieu Denoual (1) , Mathieu Pouliquen (2) , Gilles Allègre (1) , D. Brouard (3) , A. Veith (3) , Olivier de Sagazan (4) , Patrick Attia (5)

1 Equipe Electronique - Laboratoire GREYC - UMR6072
2 Equipe Automatique - Laboratoire GREYC - UMR6072
3 ENSICAEN - École Nationale Supérieure d'Ingénieurs de Caen
4 IETR - Institut d'Électronique et des Technologies du numéRique
5 NXP Semiconductors

This paper presents a single-loop 2nd order sigmadelta interface circuit for a bolometer operating in closed-loop mode. Switched capacitor circuitry is developed to implement the sigma-delta structure. The sigma-delta modulator acts both as digital readout circuit and as a mean of heat feedback. The design approach of the sigma-delta structure and the feedback shaping is explained. The circuit is designed for a realization in AMS CMOS 0.35μm technology.

Mots clés: bolometer; sigma-delta modulator; electrical substitution; frequency sensor

Domaines: Electronique

Matthieu Denoual, Mathieu Pouliquen, Gilles Allègre, D. Brouard, A. Veith, et al.. Heat Balanced Bolometer with Sigma-Delta Interface. Proc. of SensorDevices 2012, 2012, rome, Italy. pp56-60. ⟨hal-00981587⟩