Annealing effect on microstructure of ZnO nano-particulate films and VOC gas sensing property

Noriko Saito (1) , Ken Watanabe (1) , Tangi Aubert (2) , Fabien Grasset (2) , Isao Sakaguchi (1) , Hajime Haneda (1)

1 NIMS - National Institute for Materials Science
2 ISCR - Institut des Sciences Chimiques de Rennes

We synthesized ZnO nano-particulate films by a solgel method and evaluated their gas sensing properties. A ZnO colloidal solution of 5.6nm sized nanocrystals was prepared from zinc acetate in n-propanol and dip-coated on silica glass substrates. The as-deposited ZnO film consisted of 30nm grains. Annealing the films resulted in a growth of the particles, which was confirmed by scanning probe microscopy and UVVis spectrometry. The ZnO film annealed at 400°C worked well as a gas sensor device for volatile organic compounds (VOC) gases. The sensitivity was the best in the case of ethanol gas at 350°C. The sensing performances decreased by annealing at higher temperatures due to the coalescence of the ZnO particles.

Domaines: Chimie inorganique

Noriko Saito, Ken Watanabe, Tangi Aubert, Fabien Grasset, Isao Sakaguchi, et al.. Annealing effect on microstructure of ZnO nano-particulate films and VOC gas sensing property. Journal of the Ceramic Society of Japan, 2014, 122 (1424), pp.267-270. ⟨10.2109/jcersj2.122.267⟩. ⟨hal-00974723⟩