Microwave optical switches metal-semiconductor-metal Schottky based on GaAs

Sabah Benzeghda (1, 2) , Farida Hobar (2) , Didier Decoster (1) , Jean-Francois Lampin (1) , A. Benzeghda (2)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 LMI - Laboratoire de recherche microsystèmes et instrumentation

Interdigitated metal-semiconductor-metal (MSM) photodetectors have received considerable attention for applications in microwave optical phoswitches. The impulse response of interdigitated metal-semiconductor- metal photoswich fabricated on GaAs non-intentional doped (NID) absorbing layer is investigated. The photodetector MSM is introduced in the microwave lines have active surfaces of 3x3 μm2 and electrode spacing of 0.2, 0.3, 0.5 and 1 μm. The photocurrent response was measured after excitation and we found that the screening of the dark electric field and charge accumulation exceedingly modify the drift conditions of the photogenerated electrons and holes in active region of the MSM photoswich.

Mots clés: impulse response; MSM photodetector; space charge

Domaines: Sciences de l'ingénieur [physics]

Sabah Benzeghda, Farida Hobar, Didier Decoster, Jean-Francois Lampin, A. Benzeghda. Microwave optical switches metal-semiconductor-metal Schottky based on GaAs. International Conference on Renewable Energies and Power Quality, ICREPQ'14, 2014, Córdoba, Spain. paper 534, 5 p., ⟨10.24084/repqj12.534⟩. ⟨hal-00955226⟩