Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

Denis Bouscaud (1) , Raphaël Pesci (1) , Sophie Berveiller (1) , Etienne Patoor (1)

1 LEM3 - Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux

A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.

Mots clés: Kossel microdiffraction; Scanning electron microscope; Lattice parameter; Specimen heating; X-rays spatial resolution

Domaines: Matériaux; Micro et nanotechnologies/Microélectronique

Denis Bouscaud, Raphaël Pesci, Sophie Berveiller, Etienne Patoor. Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope. Ultramicroscopy, 2012, 115, pp.115-119. ⟨10.1016/j.ultramic.2012.01.018⟩. ⟨hal-00951877⟩