Low-cost automatic system for the control of the surface quality of coated and uncoated wafers

A. Joerg (1) , J. Lumeau (1) , M. Zerrad (2) , M. Lequime (1)

1 RCMO - RCMO
2 CONCEPT - CONCEPT

An automatic system for the characterization of the surface quality of wafers is presented. It is based on the imaging of the surface defects scattered light. Detailed procedure and experimental data are presented.

Domaines: Optique / photonique

A. Joerg, J. Lumeau, M. Zerrad, M. Lequime. Low-cost automatic system for the control of the surface quality of coated and uncoated wafers. Optical Interference Coatings, Jun 2013, Whistler, Canada. Papier PTE.8. ⟨hal-00946576⟩