Low-cost automatic system for the control of the surface quality of coated and uncoated wafers

A. Joerg 1 J. Lumeau 1 M. Zerrad 2 M. Lequime 1
1 RCMO - RCMO
FRESNEL - Institut FRESNEL
2 CONCEPT - CONCEPT
FRESNEL - Institut FRESNEL
Abstract : An automatic system for the characterization of the surface quality of wafers is presented. It is based on the imaging of the surface defects scattered light. Detailed procedure and experimental data are presented.
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00946576
Contributor : Julien Lumeau <>
Submitted on : Thursday, February 13, 2014 - 4:42:13 PM
Last modification on : Monday, March 4, 2019 - 2:04:24 PM

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  • HAL Id : hal-00946576, version 1

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A. Joerg, J. Lumeau, M. Zerrad, M. Lequime. Low-cost automatic system for the control of the surface quality of coated and uncoated wafers. Optical Interference Coatings, Jun 2013, Whistler, Canada. Papier PTE.8. ⟨hal-00946576⟩

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