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Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances

Christos L. Chochos 1 Esma Ismailova 1 Cyril Brochon 2, 3 Nicolas Leclerc 1 Raluca Tiron 4 Claire Sourd 4 Philippe Bandelier 4 Johann Foucher 5 Hassan Ridaoui 6 Ali Dirani 6 Olivier Soppera 7 Damien Perret 8 Christophe Brault 1, 8 Christophe Serra 1 Georges Hadziioannou 2, 3
1 Ecole nationale supérieure de chimie, polymères et materiaux de strasbourg (ECPM)
2 Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
LCPO - Laboratoire de Chimie des Polymères Organiques
3 LCPO - Laboratoire de Chimie des Polymères Organiques
4 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
5 Lithography Laboratory
6 PHOTON LRC 7228 - Photomatériaux pour l'Optique et les Nanotechnologies
7 DPG - Département de Photochimie Générale
8 Rohm et Haas Electronic Materials
Abstract : A chemically amplified resist based on a hyperbranched polymer resin is demonstrated for the first time. The hyperbranched polymer is synthesized using the atom-transfer radical polymerization (ATRP) technique, and resists prepared from this hyperbranched polymer present good pattern profiles and line-edge roughness (3 sigma) values comparable to those of the reference (commercial) resist.
Keywords : AMPLIFICATION SCANNING PROBE LITHOGRAPHY ATOMIC-FORCE MICROSCOPY RADICAL POLYMERIZATION RAFT POLYMERIZATION NM LITHOGRAPHY END-GROUPS MICROLITHOGRAPHY PHOTORESISTS COPOLYMERS
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https://hal.archives-ouvertes.fr/hal-00945178
Contributor : Dominique Richard Connect in order to contact the contributor
Submitted on : Tuesday, February 11, 2014 - 5:34:41 PM
Last modification on : Monday, March 28, 2022 - 1:02:04 PM

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CEA | CNRS | INC-CNRS | DRT | LETI | SITE-ALSACE | CEA-GRE | LCPO

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Christos L. Chochos, Esma Ismailova, Cyril Brochon, Nicolas Leclerc, Raluca Tiron, et al.. Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances. Advanced Materials, Wiley-VCH Verlag, 2009, 21 (10-11), pp.1121-1125. ⟨10.1002/adma.200801715⟩. ⟨hal-00945178⟩

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