Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances

Christos L. Chochos ¹ AuthorId : 354939
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Esma Ismailova ¹ AuthorId : 354938
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Cyril Brochon ^{2, 3} AuthorId : 703594
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Nicolas Leclerc ¹ AuthorId : 703862
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Raluca Tiron ⁴ AuthorId : 70684
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Claire Sourd ⁴ AuthorId : 354943
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Philippe Bandelier ⁴ AuthorId : 107718
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Johann Foucher ⁵ AuthorId : 354944
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Hassan Ridaoui ⁶ AuthorId : 304716
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Ali Dirani ⁶ AuthorId : 302469
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Olivier Soppera ⁷ AuthorId : 405312
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Damien Perret ⁸ AuthorId : 354945
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Christophe Brault ^{1, 8} AuthorId : 354946
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Christophe Serra ¹ AuthorId : 401147
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Georges Hadziioannou ^{2, 3} AuthorId : 400558
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