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Dimensional characterization of biperiodic imprinted structures using optical scatterometry

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https://hal.archives-ouvertes.fr/hal-00941606
Contributor : Marielle Clot Connect in order to contact the contributor
Submitted on : Tuesday, February 4, 2014 - 10:06:57 AM
Last modification on : Wednesday, October 20, 2021 - 3:47:06 AM

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  • HAL Id : hal-00941606, version 1

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I. Gereige, D. Pietroy, J. Eid, C. Gourgon. Dimensional characterization of biperiodic imprinted structures using optical scatterometry. Microelectronic Engineering, Elsevier, 2013, 112, pp.27-30. ⟨hal-00941606⟩

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