Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation

Eddy Collin (1) , Johannes Kofler (1) , Sabine Lakhloufi (1) , Sébastien Pairis (2) , Yuriy M. Bunkov (1) , Henri Godfrin (1)

1 NEEL - UBT - Ultra-basses températures
2 NEEL - C2MA - Croissance Cristalline et MicroAnalyse

We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of the present approach, namely (soft) aluminum and (hard) niobium oxide. The temperature is used as a control parameter to access materials properties. We benefit from low temperature techniques to extract a phase-resolved measurement of the first mechanical resonance mode in cryogenic vacuum. By repeating the experiment on the same samples, after multiple metallic depositions, we can determine accurately the contribution of the coating layers to the mechanical properties in terms of surface stress, additional mass, additional elasticity and damping. Analytic theoretical expressions are derived and used to fit the data. Taking advantage of the extremely broad dynamic range provided by the technique, we can measure the anelasticity of the thin metallic film. The key parameters describing the metals' dynamics are analyzed in an original way in order to provide new experimental grounds for future theoretical modelings of the underlying mechanisms.

Mots clés: micro-mechanics; metallic thin film; dynamics; low temperatures

Domaines: Systèmes mésoscopiques et effet Hall quantique [cond-mat.mes-hall]

Eddy Collin, Johannes Kofler, Sabine Lakhloufi, Sébastien Pairis, Yuriy M. Bunkov, et al.. Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation. Journal of Applied Physics, 2010, 107 (11), pp.114905. ⟨10.1063/1.3391901⟩. ⟨hal-00919321⟩