Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor

D. Daineka (1) , D. Kouznetsov (1) , Pavel Bulkin (1) , Gabriel Girard (1) , J.E. Bouree (1) , Bernard Drévillon (1)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]

Domaines: Sciences de l'ingénieur [physics]

D. Daineka, D. Kouznetsov, Pavel Bulkin, Gabriel Girard, J.E. Bouree, et al.. Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor. European Physical Journal: Applied Physics, 2004, pp.343-346. ⟨hal-00914160⟩