Nanometer scale active ground motion isolator

Ronan Le Breton (1) , Guillaume Deleglise (2) , Julie Allibe (2) , Adrien Badel (1) , Gaël Balik (2) , Bernard Caron (1) , Andréa Jeremie (2) , Jacques Lottin (1) , Sébastien Vilalte (2)

1 SYMME - Laboratoire SYstèmes et Matériaux pour la MEcatronique
2 LAPP - Laboratoire d'Annecy de Physique des Particules

Vibration isolation is a critical issue in various precision engineering fields. A new design of an activeisolation system operating heavy loads (up to 50 kg) is presented in this work. This system provides stateof the art vibration isolation at the nanometer scale for magnets of a future particle accelerator and is more compact than other studies in this field. The choice of sensors and actuators, the mechanical designand the acquisition electronics are investigated in order to reject ground motion efficiently. A dynamic experimental characterization is performed. Based on the identified model, a specific controller, givingan attenuation between 10 Hz and 100 Hz was designed and experimentally qualified.

Mots clés: Active vibration; isolation Nanometer; Ground motion

Domaines: Génie mécanique [physics.class-ph]; Génie mécanique [physics.class-ph]

Ronan Le Breton, Guillaume Deleglise, Julie Allibe, Adrien Badel, Gaël Balik, et al.. Nanometer scale active ground motion isolator. Sensors and Actuators A: Physical , 2013, 204, pp.96-106. ⟨hal-00908781⟩