Structuring Lithium Niobate: Collective Etching and FIB Milling for Photonics and Phononics

Sarah Benchabane (1) , Laurent Robert (1) , Aurélie Lecestre (1) , Gwenn Ulliac (1) , Roland Salut (1) , Vincent Laude (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Fabrication processes implemented for the realization of micron-sized patterns in lithium niobate are presented, in view of applications to nanophotonics and phononics. Collective processes based on reactive ion etching in fluorine chemistries as well as FIB milling are discussed.

Domaines: Acoustique [physics.class-ph]; Acoustique [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Sarah Benchabane, Laurent Robert, Aurélie Lecestre, Gwenn Ulliac, Roland Salut, et al.. Structuring Lithium Niobate: Collective Etching and FIB Milling for Photonics and Phononics. Information Optoelectronics, Nanofabrication and Testing, 5th International Photonics and Optoelectronics Meeting, Nov 2012, Wuhan, China. ⟨hal-00908716⟩