Simulation Of Fib Sem Images For Analysis Of Porous Microstructures

Abstract : Focused ion beam nanotomography-scanning electron microscopy tomography yields high-quality three-dimensional images of materials microstructures at the nanometer scale combining serial sectioning using a focused ion beam with SEM. However, FIB-SEM tomography of highly porous media leads to shine-through artifacts preventing automatic segmentation of the solid component. We simulate the SEM process in order to generate synthetic FIB-SEM image data for developing and validating segmentation methods. Monte-Carlo techniques yield accurate results, but are too slow for the simulation of FIB-SEM tomography requiring hundreds of SEM images for one dataset alone. Nevertheless, a quasi-analytic description of the specimen and various acceleration techniques, including a track compression algorithm and an acceleration for the simulation of secondary electrons, cut down the computing time by orders of magnitude, allowing for the first time to simulate FIB-SEM tomography.
Type de document :
Article dans une revue
Scanning, Wiley-Blackwell: No OnlineOpen, 2013, 35 (3), pp.189-195
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Contributeur : François Willot <>
Soumis le : lundi 4 novembre 2013 - 12:02:00
Dernière modification le : lundi 12 novembre 2018 - 10:58:38


  • HAL Id : hal-00879573, version 1


Torben Prill, Katja Schladitz. Simulation Of Fib Sem Images For Analysis Of Porous Microstructures. Scanning, Wiley-Blackwell: No OnlineOpen, 2013, 35 (3), pp.189-195. 〈hal-00879573〉



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