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Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

Abstract : A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.
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Contributor : Nicolas Fressengeas <>
Submitted on : Wednesday, September 18, 2013 - 12:20:50 PM
Last modification on : Wednesday, April 8, 2020 - 4:08:24 PM

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Youness Laaroussi, Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Laurent Cerutti, et al.. Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs. Optical Materials Express, OSA pub, 2013, 3 (10), pp.1576-1585. ⟨10.1364/OME.3.001576⟩. ⟨hal-00863150⟩



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