Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

Youness Laaroussi; Christyves Chevallier; Frédéric Genty; Nicolas Fressengeas; Laurent Cerutti; Thierry Taliercio; Olivier Gauthier-Lafaye; Pierre-François Calmon; Benjamin Reig; Joël Jacquet; Guilhem Almuneau

doi:10.1364/OME.3.001576

Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

Youness Laaroussi ¹ Christyves Chevallier ² Frédéric Genty ² Nicolas Fressengeas ³ Laurent Cerutti ^{4, 5} Thierry Taliercio ^{4, 5} Olivier Gauthier-Lafaye ¹ Pierre-François Calmon ⁶ Benjamin Reig ¹ Joël Jacquet ² Guilhem Almuneau ¹

1 LAAS-PHOTO - Équipe Photonique

LAAS - Laboratoire d'analyse et d'architecture des systèmes

2 OPTEL - Equipe Optique et électronique pour les télécoms

3 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

4 IES - Institut d’Electronique et des Systèmes

5 NANOMIR - Composants à Nanostructure pour le moyen infrarouge

IES - Institut d’Electronique et des Systèmes

6 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

LAAS - Laboratoire d'analyse et d'architecture des systèmes

Abstract : A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.

Keywords : Infrared and far-infrared lasers Optical design and fabrication Subwavelength structures Vertical cavity surface emitting lasers

Document type :

Journal articles

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-00863150
Contributor : Nicolas Fressengeas <>
Submitted on : Wednesday, September 18, 2013 - 12:20:50 PM
Last modification on : Friday, January 10, 2020 - 9:10:14 PM

Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

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Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

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