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Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs
Abstract : A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.
https://hal.archives-ouvertes.fr/hal-00863150
Contributor : Nicolas Fressengeas Connect in order to contact the contributor
Submitted on : Tuesday, June 22, 2021 - 11:39:06 AM
Last modification on : Tuesday, May 17, 2022 - 2:10:09 PM
Long-term archiving on: : Thursday, September 23, 2021 - 6:22:37 PM
Contributor : Nicolas Fressengeas Connect in order to contact the contributor
Submitted on : Tuesday, June 22, 2021 - 11:39:06 AM
Last modification on : Tuesday, May 17, 2022 - 2:10:09 PM
Long-term archiving on: : Thursday, September 23, 2021 - 6:22:37 PM
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