Comparison and experimental validation of two potential resonant viscosity sensors in the kilohertz range

Etienne Lemaire (1) , Martin Heinisch (2) , Benjamin Caillard (1) , Bernhard Jakoby (2) , Isabelle Dufour (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 Institute for Microelectronics and Microsensors

Oscillating microstructures are well-established and find application in many fields. These include, force sensors, e.g. AFM micro-cantilevers or accelerometers based on resonant suspended plates. This contribution presents two vibrating mechanical structures acting as force sensors in liquid media in order to measure hydrodynamic interactions. Rectangular cross section microcantilevers as well as circular cross section wires are investigated. Each structure features specific benefits, which are discussed in detail. Furthermore, their mechanical parameters and their deflection in liquids are characterized. Finally, an inverse analytical model is applied to calculate the complex viscosity near the resonant frequency for both types of structures. With this approach it is possible to determine rheological parameters in the kilo Hertz range in situ within a few seconds. The monitoring of the complex viscosity of yogurt during the fermentation process is used as a proof of concept to qualify at least one of the two sensors into opaque mixtures.

Domaines: Micro et nanotechnologies/Microélectronique

Etienne Lemaire, Martin Heinisch, Benjamin Caillard, Bernhard Jakoby, Isabelle Dufour. Comparison and experimental validation of two potential resonant viscosity sensors in the kilohertz range. Measurement Science and Technology, 2013, 24, 084005 (10 p.). ⟨10.1088/0957-0233/24/8/084005⟩. ⟨hal-00843397⟩