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Article Dans Une Revue Japanese Journal of Applied Physics, part 2 : Letters Année : 2013

Synchronized B and 13C Diamond Delta Structures for an Ultimate In-Depth Chemical Characterization

Résumé

The nanometer-range depth resolution of secondary ion mass spectrometry (SIMS) profiles in diamond was achieved by the determination of the depth resolution function (DRF). The measurement of this DRF was performed thanks to isotopic-enriched diamond delta structures composed of 12C and 13C. The artificial SIMS broadening observed on the 13C depth profiles of buried doped diamond epilayers was eliminated and replaced by a boxlike 13C depth profile. Applied to boron delta-doped diamond structures, this analysis has resolved edge widths close to 0.3 nm/dec, as compared with 1.5 nm/decade on the raw SIMS data. Copyright 2013 The Japan Society of Applied Physics
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Dates et versions

hal-00838943 , version 1 (26-06-2013)

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Alexandre Fiori, François Jomard, Tokuyuki Teraji, Satoshi Koizumi, Junichi Isoya, et al.. Synchronized B and 13C Diamond Delta Structures for an Ultimate In-Depth Chemical Characterization. Japanese Journal of Applied Physics, part 2 : Letters, 2013, 6, pp.045801. ⟨10.7567/APEX.6.045801⟩. ⟨hal-00838943⟩
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