Micro-Machining of Microelectronics Chips: a Comparison between ns and fs Laser Cutting

Guillaume Savriama (1, 2) , Jean Bonfarnuzoo (2) , Virginie Liochon (2) , Agnes Petit (2) , Vincent Jarry (1) , Laurent Barreau (1) , Eric Millon (2) , Christophe Cachoncinlle (2) , Nadjib Semmar (2) , Chantal Boulmer-Leborgne (2)

1 ST-TOURS - STMicroelectronics [Tours]
2 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Guillaume Savriama, Jean Bonfarnuzoo, Virginie Liochon, Agnes Petit, Vincent Jarry, et al.. Micro-Machining of Microelectronics Chips: a Comparison between ns and fs Laser Cutting. E-MRS 2013 Spring Meeting, May 2013, Strasbourg (67), France. ⟨hal-00830539⟩