AlN/SI interfaces properties revealed by broadband characterization of coplanar waveguides

Type de document :
Communication dans un congrès
37th Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe, WOCSDICE 2013, 2013, Warnemünde, Germany. pp.37-38, 2013
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https://hal.archives-ouvertes.fr/hal-00828412
Contributeur : Marie-Renée Friscourt <>
Soumis le : vendredi 31 mai 2013 - 07:58:07
Dernière modification le : vendredi 31 mai 2013 - 07:58:07

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  • HAL Id : hal-00828412, version 1

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A. Cutivet, A. Agboton, P. Altuntas, F. Lecourt, M. Lesecq, et al.. AlN/SI interfaces properties revealed by broadband characterization of coplanar waveguides. 37th Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe, WOCSDICE 2013, 2013, Warnemünde, Germany. pp.37-38, 2013. 〈hal-00828412〉

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