J. Bartella, J. Schroeder, and K. Witting, Characterization of ITO- and TiOxNy films by spectroscopic ellipsometry, spectraphotometry and XPS, Applied Surface Science, vol.179, issue.1-4, p.181, 2001.
DOI : 10.1016/S0169-4332(01)00307-5

Y. Saito, M. Hirata, H. Tada, and M. Hyodo, particles, Applied Physics Letters, vol.63, issue.10, p.1319, 1993.
DOI : 10.1063/1.109717
URL : https://hal.archives-ouvertes.fr/hal-01069230

C. F. Wan, F. C. Sulzbach, and J. D. Luttmer, TiNxOy transparent electrode material for HgCdTe infrared devices, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.10, issue.4, p.1658, 1992.
DOI : 10.1116/1.586283

S. Piscanec, L. Colombi-ciacchi, E. Vesselli, G. Comelli, O. Sbaizero et al., Bioactivity of TiN-coated titanium implants, Acta Materialia, vol.52, issue.5, p.1237, 2004.
DOI : 10.1016/j.actamat.2003.11.020

S. H. Mohamed, O. Kappertz, T. Niemeier, R. Drese, M. M. Wakkad et al., Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films, Thin Solid Films, vol.468, issue.1-2, p.48, 2004.
DOI : 10.1016/j.tsf.2004.04.017

G. R. Torres, T. Lindgren, J. Lu, C. Granqvist, and S. Lindquist, Photoelectrochemical Study of Nitrogen-Doped Titanium Dioxide for Water Oxidation, The Journal of Physical Chemistry B, vol.108, issue.19, p.5995, 2004.
DOI : 10.1021/jp037477s

T. Ihara, M. Miyoshi, Y. Iriyama, O. Matsumoto, and S. Sugihara, Visible-light-active titanium oxide photocatalyst realized by an oxygen-deficient structure and by nitrogen doping, Applied Catalysis B: Environmental, vol.42, issue.4, p.403, 2003.
DOI : 10.1016/S0926-3373(02)00269-2

C. Sarantopoulos, A. N. Gleizes, and F. Maury, Chemical vapor deposition and characterization of nitrogen doped TiO2 thin films on glass substrates, Thin Solid Films, vol.518, issue.4, p.1299, 2009.
DOI : 10.1016/j.tsf.2009.04.070
URL : https://hal.archives-ouvertes.fr/hal-00445826

F. Duminica and F. Maury, In situ IR pyrometric analysis during thermal treatment in air of TiOxNy coatings, Surface and Coatings Technology, vol.202, issue.11, p.2423, 2008.
DOI : 10.1016/j.surfcoat.2007.07.051

R. David and . Lide, CRC Handbook of Chemistry and Physics, Internet Version, p.9, 2010.

K. Holmberg and A. Matthews, Coating Tribology, Tribology Series, 1994.