Robotic microassembly and micromanipulation at FEMTO-ST

Joël Agnus (1) , Nicolas Chaillet (1) , Cédric Clévy (1) , Sounkalo Dembélé (1) , Michaël Gauthier (1) , Yassine Haddab (1) , Guillaume J. Laurent (1) , Philippe Lutz (1) , Nadine Le Fort-Piat (1) , Kanty Rabenorosoa (1) , Micky Rakotondrabe (1) , Brahim Tamadazte (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper deals with a historical overview of Q1 Q2 8 9 the activities of the French FEMTO-ST institute in the 10 field of microrobotic manipulation and assembly. It firstly 11 shows tools developed for fine and coarse positioning: 12 4 DOF microgrippers, 2 DOF modules and smart sur13 faces. The paper then goes on the automation of tridimen14 sional microassembly of objects measuring between 10 and 15 400 microns. We are especially focusing on several princi16 ples. Closed loop control based on micro-vision has been 17 studied and applied on the fully automatic assembly of 18 several 400 microns objects. Force control has been also 19 analyzed and is proposed for optical Microsystems assem20 bly. At least, open loop trajectories of 40 microns objects 21 with a throughput of 1,800 unit per hour have been achieved. 22 Scientific and technological aspects and industrial relevance will be presented.

Mots clés: Microgrippers; MEMS assembly.; microassembly; micromanipulation; microrobotic automation; MEMS assembly

Domaines: Micro et nanotechnologies/Microélectronique

Joël Agnus, Nicolas Chaillet, Cédric Clévy, Sounkalo Dembélé, Michaël Gauthier, et al.. Robotic microassembly and micromanipulation at FEMTO-ST. Journal of Micro-Bio Robotics, 2013, 8 (2), pp.91-106. ⟨10.1007/s12213-013-0065-5⟩. ⟨hal-00801873⟩