Cantilever Anemometer Based on a Superconducting Micro-resonator: Application to Superfluid Turbulence

Abstract : We present a new type of cryogenic local velocity probe that operates in liquid helium (1K < T < 4.2 K) and achieves a spatial resolution of $\approx\SI{0.1}{mm}$. The operating principle is based on the deflection of a micro-machined silicon cantilever which reflects the local fluid velocity. Deflection is probed using a superconducting niobium micro-resonator sputtered on the sensor and used as a strain gauge. We present the working principle and the design of the probe, as well as calibration measurements and velocity spectra obtained in a turbulent helium flow above and below the superfluid transition.
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Julien Salort, Alessandro Monfardini, Philippe-Emmanuel Roche. Cantilever Anemometer Based on a Superconducting Micro-resonator: Application to Superfluid Turbulence. Review of Scientific Instruments, American Institute of Physics, 2012, 83, pp.125002. 〈10.1063/1.4770119〉. 〈hal-00796196〉

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