A simple model for the in-plane response of a cantilever/disk resonator in liquid: resonant frequency, quality factor, and optimal geometry

Mohamad Sotoudegan (1) , Stephen Heinrich (1) , Fabien Josse (2) , Nicholas Nigro (1) , Isabelle Dufour (3) , Oliver Brand (4)

1 Department of Civil, Construction and Environmental Engineering [Milwaukee]
2 Department of Electrical and Computer Engineering
3 IMS - Laboratoire de l'intégration, du matériau au système
4 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology

Domaines: Micro et nanotechnologies/Microélectronique

Mohamad Sotoudegan, Stephen Heinrich, Fabien Josse, Nicholas Nigro, Isabelle Dufour, et al.. A simple model for the in-plane response of a cantilever/disk resonator in liquid: resonant frequency, quality factor, and optimal geometry. 10th International Workshop on Nanomechanical Cantilever Sensors, 2013, Stanford, United States. 2 p. ⟨hal-00795357⟩