Extraction of COM parameters on Pt/LGS for high temperature SAW sensor

Thierry Aubert (1) , Frédéric Sarry (1) , Omar Elmazria (1) , Laurent Bouvot (1) , Badreddine Assouar (1) , Pascal Nicolay (1) , Michel Hehn (2)

1 LPMIA - Laboratoire de physique des milieux ionisés et applications
2 LPM - Laboratoire de physique des matériaux

This work is oriented on the used of effective simulation tools to design high temperature SAW sensor. Physical constants of platinum and LGS and related temperature coefficients recently determined were implemented in FEM/SDA program. Plessky's parameters of the Pt/LGS structure were extracted for various temperatures and injected in COM software to calculate frequency response of SAW devices. A comparison between experimental and theoretical results showed good agreement up to 250°C and the requirement of a new LGS constants set.

Thierry Aubert, Frédéric Sarry, Omar Elmazria, Laurent Bouvot, Badreddine Assouar, et al.. Extraction of COM parameters on Pt/LGS for high temperature SAW sensor. IEEE International Ultrasonics Symposium, Nov 2008, China. pp.820, ⟨10.1109/ULTSYM.2008.0197⟩. ⟨hal-00784005⟩